Sputtering of metals by heavy ions in the inelastic energy loss range

By Cheblukov Y.N.   Didyk A.Y.   Halil A.   Semina V.K.   Stepanov A.E.   Suvorov A.L.   Vasiliev N.A.  

Vacuum, Vol. 66, Iss. 2, 2002-07 ,pp. : 133-136

Elsevier

Access to resources Recommend Favorite

Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings

By Lippens P.   Segers A.   Haemers J.   De Gryse R.  

Thin Solid Films, Vol. 317, Iss. 1, 1998-04 ,pp. : 405-408

Elsevier

Access to resources Recommend Favorite

Target voltage measurements during DC sputtering of silver in a nitrogen/argon plasma

By Depla D.   De Gryse R.  

Vacuum, Vol. 69, Iss. 4, 2003-01 ,pp. : 529-536

Elsevier

Access to resources Recommend Favorite

Target voltage behaviour during DC sputtering of silicon in an argon/nitrogen mixture

By Depla D.   Colpaert A.   Eufinger K.   Segers A.   Haemers J.   De Gryse R.  

Vacuum, Vol. 66, Iss. 1, 2002-06 ,pp. : 9-17

Elsevier

Access to resources Recommend Favorite

Potential of multiphoton exchange in the scattering of light charged particles of a heavy target

By Bystritskiy Yu.   Kuraev E.   Shatnev M.  

Physics of Particles and Nuclei Letters, Vol. 10, Iss. 1, 2013-01 ,pp. : 25-27

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite