Effects of argon and hydrogen plasmas on the surface of silicon

Author: Umezu I.   Kohno K.   Aoki K.   Kohama Y.   Sugimura A.   Inada M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.66, Iss.3, 2002-08, pp. : 453-456

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Abstract