Author: Shin H.-S. Hong J.-W. Jang T. Yoon E.-P. Kim I. Yeum G.-Y. Park J.-W.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.67, Iss.2, 2002-09, pp. : 185-189
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Tribological study of CN x films prepared by reactive d.c. magnetron sputtering
By Hajek V. Rusnak K. Vlcek J. Martinu L. Hawthorne H.M.
Wear, Vol. 213, Iss. 1, 1997-12 ,pp. :
Superhard nanocomposite Ti 1-x Al x N films prepared by magnetron sputtering
Thin Solid Films, Vol. 365, Iss. 1, 2000-04 ,pp. :