Tribological study of CN x films prepared by reactive d.c. magnetron sputtering

Author： Hajek V.   Rusnak K.   Vlcek J.   Martinu L.   Hawthorne H.M.  

Publisher： Elsevier

ISSN： 0043-1648

Source： Wear, Vol.213, Iss.1, 1997-12, pp. : 80-89

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