Influence of nitrogen concentration on conductivity of N-doped a-SiC:H films deposited by PECVD

Author： Huran J. Hotovy I. Kobzev A.P. Balalykin N.I.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.67, Iss.3, 2002-09, pp. : 567-570

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