Investigation of radiation damage in N doped a-SiC:H films annealed by pulsed electron beam

Author： Huran J. Hotovy I. Hasck S. Kobzev A.P. Balalykin N.I.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.58, Iss.2, 2000-08, pp. : 428-433

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