Sensitivity of hydrogen plasma-treated SiO 2 /Si structures to high-energy electron irradiation

Author: Alexandrova S.   Kaschieva S.   Halova E.   Valcheva E.   Szekeres A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.69, Iss.1, 2002-12, pp. : 103-106

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Abstract