Nitrogen dissociation in N 2 -Ar microwave plasmas

Author: Henriques J.   Tatarova E.   Guerra V.   Ferreira C.M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.69, Iss.1, 2002-12, pp. : 177-181

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract