IR and Raman absorption spectroscopic studies of APCVD, LPCVD and PECVD thin SiN films

Author: Beshkov G.   Lei S.   Lazarova V.   Nedev N.   Georgiev S.S.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.69, Iss.1, 2002-12, pp. : 301-305

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Abstract