Moisture-resistant properties of SiN x films prepared by PECVD

Author: Lin H.   Xu L.   Chen X.   Wang X.   Sheng M.   Stubhan F.   Merkel K.-H.   Wilde J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.333, Iss.1, 1998-11, pp. : 71-76

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract