Influence of amorphization-recrystallization processes on distribution of selenium and oxygen atoms implanted in silicon

Author: Tishkovsky E.   Feklistov K.   Taskin A.   Zatolokin M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.70, Iss.2, 2003-03, pp. : 153-156

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract