Relations between deposition conditions, microstructure and mechanical properties of amorphous carbon-metal films

Author： Uglova V.V. Anishchik V.M. Pauleau Y. Kuleshov A.K. Thiery F. Pelletier J. Dub S.N. Rusalsky D.P.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.70, Iss.2, 2003-03, pp. : 181-185

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