Characteristics of surface and film morphology in the IBAD deposition process: a Monte Carlo simulation study

Author: Oleszkiewicz W.   Romiszowski P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.70, Iss.2, 2003-03, pp. : 347-352

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract