Investigation of the nano-structural properties of amorphous silicon carbon alloys by IBA technique, optical spectroscopy and GISAXS

Author： Gracin D. Jaksic M. Dubcek P. Medunic Z.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.71, Iss.1, 2003-05, pp. : 47-51

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