Characterization of amorphous silicon carbon alloys by IBA technique and optical spectroscopy

Author： Gracin D.   Jaksic M.   Bogdanovic-Radovic I.   Medunic Z.   Car T.   Pracek B.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.67, Iss.3, 2002-09, pp. : 519-523

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