The barrier discharge: basic properties and applications to surface treatment

Author： Wagner H.-E.   Brandenburg R.   Kozlov K.V.   Sonnenfeld A.   Michel P.   Behnke J.F.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.71, Iss.3, 2003-05, pp. : 417-436

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