Development of a focused ion beam (FIB) technique to minimize X-ray fluorescence during energy dispersive X-ray spectroscopy (EDS) of FIB specimens in the transmission electron microscope (TEM)

Author： Longo D.M.   Howe J.M.   Johnson W.C.  

Publisher： Elsevier

ISSN： 0304-3991

Source： Ultramicroscopy, Vol.80, Iss.2, 1999-10, pp. : 69-84

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