Influence of Electrochemical Parameters on the Etching of Macropores in Silicon

Author： Karachevtseva L. A.   Litvinenko O. A.   Stronskaya E. I.  

Publisher： Springer Publishing Company

ISSN： 0040-5760

Source： Theoretical and Experimental Chemistry, Vol.39, Iss.6, 2003-11, pp. : 385-388

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