Polycrystalline silicon carbide as a substrate material for reducing adhesion in MEMS

Author： Gao D. Carraro C. Howe R.T. Maboudian R.

ISSN： 1023-8883

Source： Tribology Letters, Vol.21, Iss.3, 2006-03, pp. : 226-232

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Investigation of Silicon Nitride as an Excellent Membrane Material for MEMS Ultrasonic Transducers

Applied Mechanics and Materials, Vol. 2016, Iss. 860, 2017-02 ,pp. : 41-45

Trans Tech Publications

Access to resources Recommend Favorite

Synthesis of MAX-Phase of Titanium Silicon Carbide (Ti₃SiC₂) as a Promising Electric Contact Material by SHS Pressing Method

Applied Mechanics and Materials, Vol. 2015, Iss. 792, 2015-10 ,pp. : 596-601

Trans Tech Publications

Access to resources Recommend Favorite

Integration of wear-resistant titanium carbide coatings into MEMS fabrication processes

By Radhakrishnan G. Adams P.M. Robertson R. Cole R.

Tribology Letters, Vol. 8, Iss. 2-3, 2000-01 ,pp. : 133-137

Springer Publishing Company

Access to resources Recommend Favorite

Wear study of carbon–silicon carbide couples

By vantomme P.

Tribology Letters, Vol. 8, Iss. 1, 2000-01 ,pp. : 51-56

Springer Publishing Company

Access to resources Recommend Favorite

Tribological Impact of SiC Encapsulation of Released Polycrystalline Silicon Microstructures

By Ashurst W.R.

Tribology Letters, Vol. 17, Iss. 2, 2004-08 ,pp. : 195-198

Springer Publishing Company

Access to resources Recommend Favorite