On astigmatism of multi-beam optical stress sensor mounted at large incident angle

Author: Jiang J.   Hwang H.   Lee H.S.   Kim B.   Bong K.   Yoon E.  

Publisher: Elsevier

ISSN: 0022-0248

Source: Journal of Crystal Growth, Vol.260, Iss.1, 2004-01, pp. : 277-285

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Abstract