Hydrogen related defects in neutron-irradiated silicon grown in hydrogen ambient

Author： Wang Q.-Y.   Wang J.-H.   Deng H.-F.   Lin L.-Y.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 333-339

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