Hydrogen-sensing properties of multi-layer device Pt/SiGe sputtered on oxidized silicon substrate

Author: Qiu F.   Shin W.   Matsumiya M.   Izu N.   Murayama N.  

Publisher: Elsevier

ISSN: 0254-0584

Source: Materials Chemistry and Physics, Vol.82, Iss.3, 2003-12, pp. : 575-582

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