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Author: Cho M. Koh K. Morikawa K. Arai K. Jung H. Zhu Z. Yao T. Okada Y.
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.26, Iss.5, 1997-05, pp. : 423-428
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
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