Laser-induced direct etching of GaAs using chlorofluorocarbon (CFC) alternative gases

Author： Kim Moo-Sung Lee Cheon Park Se Choi Won Kim Eun Kim Seong-Il Ahn Byoung Min Suk-Ki

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.26, Iss.5, 1997-05, pp. : 436-439

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