Growth of thick gan films on rf sputtered ain buffer layer by hydride vapor phase epitaxy

Author: Lee Heon   Yuri Masaaki   Ueda Tetsuzo   Harris James   Sin Kyusik  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.8, 1997-08, pp. : 898-902

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Abstract