Author: Hsu J.W.P. Lang D.V. Richter S. Kleiman R.N. Sergent A.M. Look D.C. Molnar R.J.
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.30, Iss.3, 2001-03, pp. : 115-122
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Abstract
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