Gas source molecular beam epitaxy grown strained-Si films on step-graded relaxed Si 1−x Ge x for MOS applications

Author: Bera L.   Ray S.   Nayak D.   Usami N.   Shiraki Y.   Maiti C.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.28, Iss.2, 1999-02, pp. : 98-104

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Abstract