Al, B, and Ga ion-implantation doping of SiC

Author： Handy Evan   Rao Mulpuri   Holland O.   Chi P.   Jones K.   Derenge M.   Vispute R.   Venkatesan T.  

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.29, Iss.11, 2000-11, pp. : 1340-1345

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