Doping of 3C-SiC by implantation of nitrogen at high temperatures

Author: Lossy R.   Reichert W.   Obermeier E.   Skorupa W.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 123-127

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Abstract