Properties of Indium-Doped ZnO Films Prepared in an Oxygen-Rich Plasma

Author： Li Hui   Xie Erqing   Qiao Min   Pan Xiaojun   Zhang Yongzhe  

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.36, Iss.9, 2007-09, pp. : 1219-1223

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