Author: Ziegler Mathias
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.39, Iss.6, 2010-06, pp. : 709-714
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Avrutin Eugene A Ryvkin Boris S Payusov Alexey S Serin Artem A Avrutin Eugene A
Semiconductor Science and Technology, Vol. 30, Iss. 11, 2015-11 ,pp. :