In situ control of SiO x composition by spectroscopic ellipsometry

Author： Gallas B.   Kao C.-C.   Fisson S.   Vuye G.   Rivory J.  

Publisher： Elsevier

ISSN： 0921-5107

Source： Materials Science and Engineering: B, Vol.105, Iss.1, 2003-12, pp. : 204-207

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