Nano-indentation method for the measurement of the Poisson's ratio of MEMS thin films

Author： Kim J.-H.   Yeon S.-C.   Jeon Y.-K.   Kim J.-G.   Kim Y.-H.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 20-27

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Effects of Poisson's ratio on the deformation of thin membrane structures under indentation

By  

PHYSICA STATUS SOLIDI (B) BASIC SOLID STATE PHYSICS, Vol. 252, Iss. 7, 2015-07 ,pp. : 1526-1532

John Wiley & Sons Inc

Access to resources Recommend Favorite

Residual stress measurement in thin carbon films by Raman spectroscopy and nanoindentation

By Taylor C.A.   Wayne M.F.   Chiu W.K.S.  

Thin Solid Films, Vol. 429, Iss. 1, 2003-04 ,pp. : 190-200

Elsevier

Access to resources Recommend Favorite

Simulation of Berkovich nanoindentation experiments on thin films using finite element method

By Lenardi C.   Lichinchi M.   Haupt J.   Vitali R.  

Thin Solid Films, Vol. 312, Iss. 1, 1998-01 ,pp. : 240-248

Elsevier

Access to resources Recommend Favorite

Is the second harmonic method applicable for thin films mechanical properties characterization by nanoindentation?

By Guillonneau G.   Kermouche G.   Teisseire J.   Barthel E.   Bec S.   Loubet J.-L.  

Philosophical Magazine, Vol. 95, Iss. 16-18, 2015-06 ,pp. : 1999-2011

Taylor & Francis Ltd

Access to resources Recommend Favorite

A new method for measurement of the toughness of brittle thin films

By Kamiya S.   Kimura H.   Saka M.   Abe H.  

Thin Solid Films, Vol. 389, Iss. 1, 2001-06 ,pp. : 180-186

Elsevier

Access to resources Recommend Favorite