Effects of temperatures on microstructures and bonding strengths of Si-Si bonding using bisbenzocyclobutene

Author: Choi Y.-S.   Park J.-S.   Park H.-D.   Song Y.-H.   Jung J.-S.   Kang S.-G.  

Publisher: Elsevier

ISSN: 0924-4247

Source: Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 201-205

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Abstract