Mechanical characterization of micromachined capacitive switches: design consideration and experimental verification

Author： Huang J.-M.   Liu A.Q.   Lu C.   Ahn J.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 36-48

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