Study on low voltage actuated MEMS rf capacitive switches

Author： Guo F.M.   Zhu Z.Q.   Long Y.F.   Wang W.M.   Zhu S.Z.   Lai Z.S.   Li N.   Yang G.Q.   Lu W.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 128-133

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