High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE

Author： Hung V.N.   Abe T.   Minh P.N.   Esashi M.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 91-96

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