SiC heteroepitaxial growth by low pressure chemical vapor deposition on Si(111) substrates

Author: Yan F.   Zheng Y.D.   Chen P.   Sun L.   Gu S.L.  

Publisher: Elsevier

ISSN: 0925-3467

Source: Optical Materials, Vol.23, Iss.1, 2003-07, pp. : 113-116

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Abstract