Influence of argon gas pressure on the crystallinity of -SiC epitaxial films fabricated by Nd:YAG pulsed-laser deposition

Author： Kusumori T. Muto H.

Publisher： Elsevier

ISSN： 0925-3467

Source： Optical Materials, Vol.23, Iss.1, 2003-07, pp. : 55-60

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