Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

Author: Furjes P.   Kovacs A.   Ducso C.   Adam M.   Muller B.   Mescheder U.  

Publisher: Elsevier

ISSN: 0925-4005

Source: Sensors and Actuators B: Chemical, Vol.95, Iss.1, 2003-10, pp. : 140-144

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Abstract