Thermal properties of suspended porous silicon micro-hotplates for sensor applications

Author: Tsamis C.   Nassiopoulou A.G.   Tserepi A.  

Publisher: Elsevier

ISSN: 0925-4005

Source: Sensors and Actuators B: Chemical, Vol.95, Iss.1, 2003-10, pp. : 78-82

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Abstract