Nanostructure of near-surface Si layers formed by implantation and pulsed laser annealing

Author: Klinger D.   Auleytner J.   Zymierska D.   Nowicki L.  

Publisher: Elsevier

ISSN: 0925-8388

Source: Journal of Alloys and Compounds, Vol.362, Iss.1, 2004-01, pp. : 282-286

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Abstract