Vertical nanopatterning of 6H-SiC(0001) surfaces using gold-metal nanotube membrane lithography

Author: Lee W.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.83, Iss.3, 2006-06, pp. : 361-363

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract