Deposition of polyimide precursor by resonant infrared laser ablation

Author: Dygert N.L.   Gies A.P.   Schriver K.E.   Haglund Jr. R.F.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.89, Iss.2, 2007-11, pp. : 481-487

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Abstract