Two-step sputtered ZnO piezoelectric films for film bulk acoustic resonators

Author: Lin Re-Ching   Chen Ying-Chung   Kao Kuo-Sheng  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.89, Iss.2, 2007-11, pp. : 475-479

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Abstract