Nucleation and growth of hemispherical-grained Si by rapid thermal CVD

Author： Berger S.   Raslin O.   Gilboa H.   Iskevitch E.   Spielberg H.   Levy S.  

Publisher： Elsevier

ISSN： 0965-9773

Source： Nanostructured Materials, Vol.11, Iss.8, 1999-11, pp. : 1041-1053

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