Manufacturing and structure investigation of TiN-Al 2 O 3 -multilayers

Author: Bauer H.-D.   Arnold B.   Bartsch K.   Rennekamp R.   Leonhardt A.  

Publisher: Elsevier

ISSN: 0965-9773

Source: Nanostructured Materials, Vol.11, Iss.8, 1999-11, pp. : 1101-1109

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