Quantitative analysis of the Ge concentration in a SiGe quantum well: comparison of low-energy RBS and SIMS measurements

Author: Krecar D.   Rosner M.   Draxler M.   Bauer P.   Hutter H.  

Publisher: Springer Publishing Company

ISSN: 1618-2642

Source: Analytical and Bioanalytical Chemistry, Vol.384, Iss.2, 2006-01, pp. : 525-530

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