Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe

Author: Bemont E.   Bostel A.   Bouet M.   Da Costa G.   Chambreland S.   Deconihout B.   Hono K.  

Publisher: Elsevier

ISSN: 0304-3991

Source: Ultramicroscopy, Vol.95, Iss.unknown, 2003-05, pp. : 231-238

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Abstract