Author： Xu Jinbao Zhai Jiwei Yao Xi
Publisher： Taylor & Francis Ltd
ISSN： 0015-0193
Source： Ferroelectrics, Vol.357, Iss.1, 2007-01, pp. : 148-153
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Abstract
Ba0.7Sr0.3TiO3(BST) ferroelectric thin films on Pt(111)/Ti/SiO2/Si(100) substrates were fabricated by a sol-gel process. The microstructural characteristics proved that the prepared BST thin films with well-developed crystallinity. The infrared optical properties of the BST thin films have been investigated using an infrared spectroscopic ellipsometry(IRSE) in the wave number range of 800-4000 cm-1 (2.5-12.5 m). Au/BST/Pt capacitors have been fabricated and show a ferroelectric character with average remanent polarization of 1.8313 C/cm2and coercive fields of 48 kV/cm. The dielectric constant(εr) and the dissipation factor(tan ) at 100 kHz are 312 and 0.02, respectively.
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